Classic AEI Source Cleaning Classification
Topic
AEI Source Cleaning Instructions
Environment
ISQ 7000
ISQ 7610
Steps/Procedure
- Carefully disassemble and separate the parts into the proper categories indicated by the color code seen here.
- For parts not in sample path, you should rinse and sonicate only as needed.
- For parts in the sample path, you should scrub with aluminum oxide, rinse, and sonicate.
- For parts not in sample path, there is no cleaning required.
- These parts should be replaced if contaminated.
Additional Information
Knowledge Check:
- Sample path: D & E.

