Compustage X-axis unable to move to +999um, when holder is being inserted

Issue

Compustage X-axis unable to move to +999um, when Holder is being inserted

Environment

Titan ETEM G2

Resolution

These are possible resolutions for the issue:

• Replace new Floating_rod + new Holder O-ring.

Cause

These are possible causes for the issue:

• Due to Customer uses Unidentified Custom-made Holders, which may cause damages and wear-outs at the inner tubbing of "Floating_rod".

Details

Several Troubleshooting Actions had been done:

1. Try to swap both UTP ethernet cables from Left Panel to Right Panel.
2. Try to swap with other DT-Holder available.
3. Double check the X and Y-axis Donator clamper leveling.
   • As possible to be parallel with Donator.
4. Using TEM_UI Stage2 OCX with "Absolute Positioning".
   • Moving stage X and Y-axis individually.
   • Watch TAD – Compustage Info for the voltages.
5. Using "Jog" Feature in TAD – Compustage Info for the Voltages, too.
6. Check V-Groove assembly by WI-4022 190 53024 --- adjust V-Groove assembly.
7. Try to Grease all Compustage gears with Molykote.

All above Troubleshooting, had made confirmed of Compustage to be working correctly.

• Meanwhile when Compustage without holder being inserted, moving towards +999 ~ –999 range can be reached with no issue.
• Customer do have their own Custom-made Holders, suspected these Unidentified Holder caused the damages on Floating_rod.

Final Action done, Replace Floating_rod + Sample Holder O-Rings.

• Advised to use only with Braycote Vacuum Grease P/N: 4022 268 00273.
• Problem Resolved.