Ultimono ; Performance degraded ; low beam current

Issue

Ultimono performance degraded and screen current very low

Environment

Spectra 200, Spectra 300, Spectra C, Spectra Ultra

Resolution

These are possible resolutions for the issue:

• Perform Ultimono alignment procedure (4022 190 63889 )

Cause

These are possible causes for the issue:

• Wrong ultimono factor in Feg register

Details

After loading Factory Ultimono alg file and Feg register the optimal Ultimono value changed.
This resulted in suboptimal conditions to perform Ultimono energy resolution and to obtain a sufficient beam current for the energy resolution.