Plasma extinguishes reason, RF PSU overheating

Issue

Plasma extinguishes with overtemperature error. Plasma ignites correctly but after a few samples, it extinguishes unexpectedly, showing RF PSU overtemperature error.

Environment

• ICAPPRO
• ICAPPRO X
• ICAPPRO XP
• ICAPPRO XPS

Resolution

Remove the back and left instrument cover, (refer to ICAPPRO manual), remove the grey plastic ventilation duct, clean the dust on the ventilation inlet (see image above) and clean the plastic duct. It is recommended to repeat the cleaning task on all the maintenance visits; to reduce the dust on the PSU vent inlet, this may avoid an additional visit..

Cause

It has been observed that in a few cases this ignition behavior is not caused by a component/hardware failure. The overtemperature error may be caused also by excessive dust on the RF power supply box ventilation inlet, see image below. (I need to add two images to the article) Depending on the environment, the dust has been observed after two or three years since installation.