Exhaust Error

Issue

Plasma wouldn't light due to incorrect exhaust flow

Environment

• iCAP Q
• iCAP RQ
• ECCN: EAR99

Resolution

Viewed the plasma exhaust reading in the plasma tab of instrument control.

It was reading 1.02mbar. Adjusted damper for exhaust to bring down flow to 0.45mbar.

Analysis

Cause

Exhaust too high, due to exhaust fans being replaced and reset to highest flow.