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Thermo Fisher Scientific

Optimizing an EDS acquisition - Working Distance



When beginning an EDS acquisition, the sample-EDS detector geometry should be considered to reduce spectral artifacts.



  • Noran System 6
  • Noran system 7
  • Pathfinder


  1. Raise or lower the Z height of the stage to bring the surface of the sample to the optimal working distance of the EDS detector.
  2. If the sample is too high or too low, the detector may not “see” any x-rays.
  3. If the working distance is above or below the optimal working distance, the probability of generating escape peaks is increased.
  4. Depending on the sample surface, the optimal working distance may not possible. Under these conditions, just remember that escape peaks may be generated and take them into account when identifying peaks.


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