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Thermo Fisher Scientific

Silicon Wafer Properties For Use With FTIR


What are three key properties for the silicon wafer that will give the optimum performance in FTIR analysis?




  • Backside finish should be selected to be low scattering (bright-etch) for best S/N and low variability
  • Resistivity needs to be above 5 ꭥ-cm to maintain optical transparency and eliminate variability from this source
  • Interstitial oxygen should be controlled to minimize spectral variation introduced from the wafer


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